MEMS Mechanical Sensors by Steve P Beeby 2004

Description

MEMS Mechanical Sensors by Steve P. Beeby (2004).pdf


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Product Details
Hardcover: 282 pages
Publisher: Artech House Publishers (May, 2004)
Language: English
ISBN: 1580535364


Book Description
Here’s the book to keep handy when you have to overcome obstacles in design, simulation, fabrication and application of MEMS sensors. This practical guide to design tools and packaging helps you create the sensors you need for the full range of mechanical microsensor applications. Critical physical sensing techniques covered include piezoresistive, piezoelectric, capacative, optical, resonant, actuation, thermal, and magnetic, as well as smart sensing.
This new resource explores all the major areas of mechanical microsensors and takes an especially close look at pressure and inertial sensors. Engineers in industry and academia can tap into current and future market trends in such key applications areas for mechanical microsensors as force and torque, flow in microfluidics, and displacement. A thorough introduction to physical sensors, MEMS, and the properties of silicon brings you up to speed with the state of the art of this groundbreaking technology.

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